Pfeiffer Vacuum’s HiPace 350 and 450 turbopumps are dedicated for applications like mass spectrometry, electron microscopy, metrology tools, particle accelerators and plasma physics, as well as coating, R&D and industrial applications. HiPace 350 and 450 have low weight and a small footprint. They are based on a hybrid bearing, a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side. The rotor design of the turbopumps results in a high pumping speed for light gases. High backing pump compatibility and high gas throughput as well as excellent compression for light gases are made possible by the rotor design.
The integrated HiPace drive electronics offer a variety of communication interfaces, including ProfiNet and EtherCat without any increase in physical size. Remote and sensor functionalities allow the analysis of pump data, such as temperatures. The pumps are certified to Semi S2, UL, CSA and Nema 12. Bearing maintenance on-site is possible. Bearing exchange can be done on the customer’s site and the pumps can run for up to five years without service.